LIMS - [View Tool]

No access? Apply for access here...

Username:

Password:

Sputter AJA (4050)

Current status:

AVAILABLE

Book | Log|

Show/Collapse all

Responsibles

1st Responsible:

Kaiying Wang

2nd Responsible:

Files

You must be logged in to view files.

Description

TARGETS FOR SPUTTRING : Au, Ti 90 W10 wt%, Ti10W90 wt%, Cu, SiO₂.

TARGETS FOR E- BEAM: Ti, Ni,Cr.

Details

Tool name:

Sputter AJA

Area/room:

G2-33 Cleanroom

Category:

Thin film deposition

Manufacturer:

AJA International Inc.

Model:

ATC 20x20x30

Tool rate:

Tool Modes

You must be logged in to view tool modes.