Picture of Sputter AJA
Current status:
AVAILABLE
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TARGETS FOR SPUTTRING : Au, Ti 90 W10 wt%, Ti10W90 wt%, Cu, SiO2.

TARGETS FOR E- BEAM:  Ti, Ni,Cr.

Tool name:
Sputter AJA
Area/room:
G2-33 Cleanroom
Category:
Thin film deposition
Manufacturer:
AJA International Inc.
Model:
ATC 20x20x30
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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