Picture of Au sputter VG Microtech SC500
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Fison Instruments Polaron SC500 is a small sputter coater for deposition of thin layer of Au. Typical use is for SEM sample preparation. It is easy to use and it is also possible to mount and use other targets for deposition of f.ex.  Au/Pd, Pd, Pt, Ni or Ag.

Technical Data: Au Sputter coater for deposition on pieces (of wafers), Si and others.

Tool name:
Au sputter VG Microtech SC500
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
VG microtech
Model:
Polaron SC500
Max booking time, day:
hours
Max booking time, night:
hours
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