Picture of Plasma Cleaner PPS
Current status:
AVAILABLE
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2nd Responsible:
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Tool name:
Plasma Cleaner PPS
Area/room:
G2-33 Cleanroom
Category:
Dry etching
Manufacturer:
PPS
Model:
AL18, Sn. 3212/1709
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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