Picture of Elipsometer
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Kim Gustavsen
2nd Responsible:
Anh Tuan Thai Nguyen
Files
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Description
Details
Tool name:
Elipsometer
Area/room:
G2-33 Cleanroom
Category:
Characterization
Manufacturer:
Wollam Co.
Model:
alpha SE
Tool rate:
C
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Tool Modes
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